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diode sputter-ion pump [1 record]

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Record 1 2014-11-10

English

Subject field(s)
  • Vacuum Machines
OBS

Some constructional arrangements for diode sputter-ion pumps: (a) Small pump in flat rectangular body; electrodes are non-renewable. (b) Larger rectangular pump with wide mouth permitting removal and renewal of electrodes.

French

Domaine(s)
  • Machines à vide
CONT

Performances des pompes ioniques diodes. La vitesse de pompage varie avec la pression d'utilisation.

Spanish

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